| 摘要 |
PROBLEM TO BE SOLVED: To provide a using method of a sheet for suction-fixing that can prevent damage, contact trace, and breakdown of a suction-fixed member to be suctioned to the sheet for suction-fixing. SOLUTION: This using method of the sheet for suction-fixing is employed when suction-fixing the member to be suction-fixed. The sheet is constituted with inclusion of at least a porous sheet. The using method is characterized in that the suction-fixed member is floated by blowing out gas through the sheet for suction-fixing on which the member to be suction-fixed is placed when the suction-fixed member is transferred. COPYRIGHT: (C)2008,JPO&INPIT |
