CONDUCTIVE CORROSION RESISTANT MEMBER AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a conductive corrosion resistant member having both high corrosion resistance and high conductivity to a halogen group corrosive gas and their plasma and to provide its manufacturing method. SOLUTION: The conductive corrosion resistant member is composed of a combined sintered body containing metal yttrium, carbon and yttrium oxide. COPYRIGHT: (C)2008,JPO&INPIT