INSPECTION DEVICE, INSPECTION METHOD, AND INSPECTION DEVICE SENSOR

摘要

There is provided an inspection device capable of accurately detecting a state of an object of inspection in a non-contact way when the object is a conductive body. A power supply sensor plate (20) of vertically long shape to which an AC inspection signal is applied is positioned at a predetermined distance from a conductive pattern (15) as an inspection object and supplies an inspection signal. A detection sensor plate (30) of vertically short shape can be positioned in the vicinity of the inspection signal detection portion of the conductive pattern (15) and detects the inspection signal from the conductive pattern (15). A plurality of sets of the power supply sensor plate (20) and the detection sensor plate (30) are positioned so that the different sensor plates are alternately positioned. The same conductive pattern (15) is inspected by the respective sensor plate sets.