| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing device easy to take a balance of a tool holding member held freely to oscillate. SOLUTION: The polishing device is provided with: a first base 3, a second base 5 and a third base 7 placed on a horizontal frame 1 freely to move in three axial directions orthogonal one another; a support member 13 provided in the third base 7; the tool holding member 35 rotatably provided in the support member 13; and a polishing tool 41 provided in the tool holding member 35. A proximity sensor 51 is provided to confirm whether the tool holding member 35 is horizontal. A metal fixture 53 to be detected by the proximity sensor 51 is fixed to the tool holding member 35 so that the tool holding member 35 is rotated in relation to the support member 13 and positioned on the axis of the proximity sensor 51 when the axial direction of the tool holding member 35 becomes horizontal. COPYRIGHT: (C)2008,JPO&INPIT
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