| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of inspecting the foreign matter in a resin composition for forming a simple and accurate black matrix. <P>SOLUTION: The method includes a scanning step of irradiating the surface of a sample, wherein the resin composition for forming the black matrix is applied to a substrate, with an energy beam to scan the same, a reflected light detection step of detecting the reflected light from the surface of the sample, a conversion step of converting the image detected by the reflected light detection step to digital data, a coordinate axis forming step of allotting the x-y coordinates on the substrate of the image obtained by the conversion step, a foreign matter detection step of detecting the foreign matter on the basis of the image obtained from the coordinate axis forming step and the reflected light detection step and a foreign matter specifying step of specifying the foreign matter on the basis of the foreign matter detection step. <P>COPYRIGHT: (C)2008,JPO&INPIT |
