| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate for use of an electronic device capable of manufacturing the substrate for use of an electronic device which can get light-weighted and flexible and can prevent an adverse influence on a layer provided thereon to structure an electronic device with excellent characteristics, the substrate for use of the electronic device manufactured by the method, the highly reliable electronic device, and an electronic appliance. SOLUTION: The manufacturing method of the substrate for use of the electronic device includes a first step of forming a polyorganosiloxane film 30 constituted mainly of polyorganosiloxane on one of surfaces of a substrate 20 constituted mainly of a resin material by means of plasma polymerization, a second step of making the film 30 lyophilic for a surface of the film 30 opposite to the substrate 20, and a third step of forming a conductive film 40 constituted mainly of a conductive material on the surface of the film 30 opposite to the substrate 20 through a liquid phase process. COPYRIGHT: (C)2008,JPO&INPIT
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