CAPACITOR MICROPHONE

摘要

It is possible to provide a capacitor microphone having an improved vibration characteristic of a diaphragm by a simple manufacturing process, reduced parasitic capacitance generated between the diaphragm and a back plate, and an improved sensitivity. More specifically, a diaphragm of a gear shape formed by a center portion and a plurality of arms and a back plate of a gear shape formed by a center portion and a plurality of arms are arranged to oppose each other on a substrate in such a manner that the arms of the diaphragm do not face the arms of the back plate. Moreover, the diaphragm and the back plate may be supported on the substrate independently from each other. Furthermore, it is possible to form a plurality of holes in the center portion of the diaphragm so that the back plate is supported on the substrate by a plurality of support members inserted in the holes.