发明名称 HIGH-RESOLUTION OPTICAL IMAGER
摘要 <p>An optical imager comprises an interferometer, microscopic optics operative in combination with the interferometer to generate a reference image and an object image, and an image capture device configured to capture an interferometric image with a phase difference between the reference image and the object image. The optical imager further comprises a phase shifter operative to selectively control the phase difference and a controller operative to capture a plurality of interferometric images at a selected plurality of phase differences and combine the plurality of interferometric images into a processed image with in-plane resolution that is increased over optical wavelength and numerical aperture characteristics.</p>
申请公布号 WO2007121175(A2) 申请公布日期 2007.10.25
申请号 WO2007US66326 申请日期 2007.04.10
申请人 LER TECHNOLOGIES, INC.;YACOUBIAN, ARAZ 发明人 YACOUBIAN, ARAZ
分类号 H01L27/00 主分类号 H01L27/00
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