| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a static electricity countermeasure component by which a static electricity countermeasure component having little variation in overvoltage protection effect can be obtained. SOLUTION: The method of manufacturing the static electricity countermeasure component includes: a process of forming a titanium thin film 7 and a copper thin film 8 on the top face of a ceramic substrate 1; a process of applying a resist 9 on the top face of the copper thin film 8; a process of exposing the resist 9 into such a pattern that can make the titanium thin film 7 and the copper thin film 8 be formed into at least a pair of extraction electrodes; a development process of removing the resist 9; an etching process of removing the titanium thin film 7 and the copper thin film 8 in the resist-removed portion to form a gap 10 between the extraction electrodes; and process of applying an overvoltage protection material in the gap 10 between the extraction electrodes. Before the development process, a precedent development process for determining the developing time is set up, and before the etching process, a precedent etching process for determining the etching time is set up. COPYRIGHT: (C)2008,JPO&INPIT
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