发明名称 COATING APPARATUS AND COATING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a coating film having high mold release characteristics and durability. SOLUTION: This coating method comprises the steps of: injecting chromium into the surface of objects to be film-formed 4a and 4b to form a chromium film thereon; injecting platinum ions into the surface of the chromium film; forming a platinum thin film on the surface; and injecting platinum ions into the surface. The method of injecting the chromium ion or the platinum ion comprises the steps of: making injecting devices 32<SB>1</SB>and 32<SB>2</SB>generate a trigger electric discharge therein by a trigger voltage to induce an arc discharge; consequently making a cathode emit the chromium ions and the platinum ions; and simultaneously applying a negative bias voltage of a pulse form to the object to be film-formed 4a and 4b, so as to synchronize with the arc discharge. Then, adhesiveness between an injected layer and a thin film is improved. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007277635(A) 申请公布日期 2007.10.25
申请号 JP20060105326 申请日期 2006.04.06
申请人 ULVAC JAPAN LTD 发明人 AGAWA YOSHIAKI;AMANO SHIGERU;HARA YASUHIRO;MATSUURA MASAMICHI;SAKAE KENICHIRO;SAITO ATSUSHI
分类号 C23C14/56 主分类号 C23C14/56
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