| 摘要 |
Cooling devices are disclosed for use with mirrors and other optical elements subject to heating during use, especially as used in lithographic exposure apparatus. The cooling devices pose minimal risk of damage caused by coolant leaks, provide simplified maintenance, and reduce vibrations while providing good cooling performance. An exemplary cooling device includes a cooling element (e.g., Peltier element) proximal to the optical element and a heat-conduction member mounted on the heat-dissipating side of the cooling element. The heat-conduction member extends, within the exposure apparatus, away from the optical element, and the extended portion of the heat-conduction member is cooled.
|
