| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive film which is low in resistivity, which is superior in heat resistance, and which has zinc oxide superior in chemical resistance as the base material. <P>SOLUTION: This is the transparent conductive film in which gallium is added to aluminum added zinc oxide (ZAO), and which is low in resistivity, superior in heat resistance and superior in chemical resistance, and this can be obtained by making aluminum content more than 2% and less than 6% by an atomic ratio of Al/(Zn+Al+Ga), and by making gallium content more than 0.1% and less than 1.0% by the atomic ratio of Ga/(Zn+Al+Ga). <P>COPYRIGHT: (C)2008,JPO&INPIT |
