| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a pattern formation body in which functional parts having a plurality of heights can efficiently be formed and adhesion between the formed functional parts and a substrate can be made excellent. <P>SOLUTION: The present invention provides the manufacturing method for the pattern formation body having at least a transparent substrate, a first functional part formed in a pattern shape on the transparent substrate, and a second functional part which is formed in a pattern shape on the transparent substrate and larger in height than the first functional part. The manufacturing method for the pattern formation body is characterized in that the first functional part and second functional part are formed through a functional part formation process including: a photosensitive resin layer formation process of forming a photosensitive resin layer by coating the transparent substrate with a coating solution for photosensitive resin layer formation; a reverse exposure process of exposing the photosensitive resin layer, formed in an area where the first functional part is to be formed and an area where the second functional part is formed to be, from the side of the transparent substrate; and a development process of developing the photosensitive resin layer. <P>COPYRIGHT: (C)2008,JPO&INPIT |
