SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus and a substrate processing method capable of preventing substrates contained in a substrate container from being sucked each other in the case of lifting up the substrate container from a processing tank. SOLUTION: In the substrate processing apparatus including: the substrate containers each having a plurality of support grooves at the inside of its opposed side parts and an opening at its bottom; the processing tank for storing its inside a processing liquid, wherein the substrate containers each supporting a plurality of substrates to the support grooves longitudinally in parallel are immersed into the processing liquid stored in the processing tank to process the substrates at the same time, the processing tank includes at its bottom one ore more support fixtures each upwards convex and whose lower ends of the substrates at the lower ends of the substrates, the opening at the bottom of each substrate container is inserted to the support fixture so that the substrates supported by each substrate container can be lifted up and supported at the same time. The technology above includes the substrate processing method using the substrate processing apparatus. COPYRIGHT: (C)2008,JPO&INPIT