发明名称 Method for obtaining improved feedforward data, a lithographic apparatus for carrying out the method and a device manufacturing method
摘要 A method of obtaining improved feedforward data for a feedforward control system to move a component through a setpoint profile is presented. The setpoint profile includes a plurality of target states of the component each to be substantially attained at one of a corresponding sequence of target times. The method includes moving the component with the feedforward control system according to the setpoint profile using a first set of feedforward data; measuring a state of the component at a plurality of times during the movement; comparing the measured states with corresponding target states defined by the setpoint profile to obtain a set of errors; filtering the set of errors with a non-linear filter; generating improved feedforward data based on the filtered errors, the improved feedforward data being usable by the feedforward control system to move the component more accurately through the setpoint profile.
申请公布号 US2007250187(A1) 申请公布日期 2007.10.25
申请号 US20060407337 申请日期 2006.04.20
申请人 ASML NETHERLANDS B.V. 发明人 HEERTJES MARCEL F.
分类号 G05B13/02 主分类号 G05B13/02
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