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发明名称
VORRICHTUNG ZUR WAFERVORBEREITUNG
摘要
申请公布号
DE60126254(T2)
申请公布日期
2007.10.25
申请号
DE20016026254T
申请日期
2001.03.29
申请人
LAM RESEARCH CORP.
发明人
JONES, DAVID;FROST, T.;DEWIT, G.
分类号
H01L21/00;H01L21/683;H01L21/304
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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