| 摘要 |
The invention concerns a method for testing electrical elements (2-1) including steps which consist in: applying a first beam of particles (4-1) to a first location (3-1) of an electrical element, to release the electrons from the first location, applying a second beam of particles (4-2) to a second location (3-2) of an electrical element, with a temporal offset (Deltat) non-null relative to the application of the first beam of particles (4-1), to release electrons of the second location, collecting the electrons released under the effect of the first and second beams of particles, and measuring at least one amount of electric charges corresponding to the collection of electrons released under the effect of the second beam of particles, and deducing therefrom quantitatively or qualitatively one electrical characteristic of the electrical element.
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