| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a mold capable of reducing the time and cost required in the formation of a thin film and capable of forming the thin film improved in uniformity and heat resistance. SOLUTION: The mold is manufactured by continuously executing an etching process, which performs the dry etching of a material 10 to be processed when the mold is produced using the material to be processed having an etching mask 15 formed thereto, a removing process, which removes the etching mask, and a film forming process, which forms a fluorine-based thin film 17 on the material to be processed, in the same apparatus. COPYRIGHT: (C)2008,JPO&INPIT |
