| 摘要 |
PROBLEM TO BE SOLVED: To eliminate a dead zone on a minute inspecting object for a leak test. SOLUTION: A plurality of inspecting objects W are together placed in a pressurized helium space within a bombing tank 10 for a long time. Thereafter, the inspecting objects W are one by one put in capsules 200 to turn the interior of the capsules 200 into a pressurized helium space for a short time. On its basis, helium from the inspecting objects is detected by a helium leak tester 230. Further, air leak test is performed by an air leak tester 240. COPYRIGHT: (C)2008,JPO&INPIT
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