| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and method capable of measuring characteristics carried by an ion beam when being emitted from an ion extraction hole of an ion source having a porous electrode, without requiring complicated operation processing. SOLUTION: The device 40a for measuring the ion beam includes a shielding plate 12 having an opening 14 to be passed by a part of an ion beam 10 extracted from the porous electrode 6 of the ion source 2, a detector 18 for detecting a beam current of the ion beam 10 passing the opening 14, and a detector driving device 24 for moving it in the x-direction. Assuming that the distance between the porous electrode 6 and the detector 18 is L, the distance between the shielding plate 12 and the detector 18 is d, a dimension of each ion extraction hole 8 of the porous electrode 6 in the x-direction is a, a gap thereof is p, a dimension of the opening 14 is b, and a dimension of the detector 18 is w, the relation expressed by the formula is satisfied: äw(L-d)+bL}/d<(p-a). COPYRIGHT: (C)2008,JPO&INPIT
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