| 摘要 |
PROBLEM TO BE SOLVED: To provide a spin coat apparatus capable of sufficiently reducing nonuniformity of a film thickness caused by a foreign matter on a surface to be coated, and a spin coat method. SOLUTION: The spin coat apparatus is provided with a table 2 placed with an object 9 to be coated and rotated in the state that it is integrated with the object 9 to be coated, a coating liquid feeding means 4 for feeding a coating liquid to the object 9 to be coated, a rotation means 5 for rotating the table, a coating liquid heating means 6 for heating the coating liquid in the coating liquid feeding means 4, and an object to be coated heating means 8 for heating the object 9 to be coated. COPYRIGHT: (C)2008,JPO&INPIT
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