MICRO DEVICE WITH MICROTUBES

摘要

The current invention is related to a micro device with microtubes that can be used as a heat exchanger for ultra fast cooling or heating of liquids. Using a damascene metal level in combination with thermal degradable polymer (TDP) enables the manufacturing of compact system of microtubes only separated by a monolayer of metallic barrier material. Due to the small distance (i.e. the thickness of the barrier) between two separate microtubes a highly efficient heat transfer between two fluids circulating in the microtubes is enabled.