发明名称
摘要 <p>PROBLEM TO BE SOLVED: To obtain a dispersing agent for abrasive grains for polishing without anxiety about an action like an environmental hormone and free from the occurrence of scratch on a surface by containing a non-alkyl phenol type polyether compound and an organic rust-preventive agent respectively having a prescribed surface tension and dispersion stability. SOLUTION: This dispersing agent comprises (A) a non alkyl-phenol type polyether comprising a mixture of (i) a polyoxyethylene mono-(6-24C)alkyl ether or polyoxyethylene mono(6-24C)alkenyl ether and (ii) a compound of the formula (R1 is H, a 1-18C alkyl, or the like, Z is a residue of a 1-6C alcohol of (p) valence; A is a 3-4C alkylene; E is ethylene; (n) is a positive integer and the average (p)&amp;times (n) is 10-200; (m) is &gt;=1 to 0 and the average of (p)&amp;times (m) is 1-300), or the like, where the weight ratio of the components (i) to (ii) is 1/5-5/1, and (B) an organic rust-preventive agent such as an alkyl amine, and exhibits surface tension of 20-40 dyne/cm in aqueous solution of 100 times dilution and the dispersing stability of the abrasive grains is 1.1 times as compared with that in water.</p>
申请公布号 JP3996314(B2) 申请公布日期 2007.10.24
申请号 JP20000024463 申请日期 2000.02.01
申请人 发明人
分类号 C09K3/14;B01F17/42;B24B37/00;C09K15/18;H01L21/304 主分类号 C09K3/14
代理机构 代理人
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