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发明名称
RF plasma processor
摘要
申请公布号
EP1204134(B1)
申请公布日期
2007.10.24
申请号
EP20020075355
申请日期
1997.06.09
申请人
LAM RESEARCH CORPORATION
发明人
HOLLAND, JOHN P.;BARNES, MICHAEL S.
分类号
H01J37/32;H05H1/46;C23C16/50;C23F4/00;H01L21/203;H01L21/205;H01L21/302
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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