STRUCTURE OF ROBOT PIN INSTALLED IN WAFER TRAY

摘要

A structure of a robot pin for use in a wafer tray is provided to minimize damage of a wafer when the wafer is loaded on lifted from the wafer tray by the robot pin. A robot pin(30) is installed on a platen(35) to load a wafer on a wafer tray or lift the wafer from the wafer tray is coated with a soft coating(32). The coating is made of a material that does not form damage on the wafer even when the pin comes in contact with the wafer and is proof against a temperature of 200 °C that is similar to a temperature of the wafer. The coating is Teflon or PVC(PolyVinyl Chloride).