发明名称 |
Probe current imaging |
摘要 |
A method including directing a first electrical signal to at least one of a plurality of probes each positioned within a chamber of a charged particle beam device. At least one of the plurality of probes is exposed to a charged particle beam of the charged particle beam device, and a second electrical signal is compared to the first electrical signal to determine a characteristic associated with the at least one of the plurality of probes.
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申请公布号 |
US7285778(B2) |
申请公布日期 |
2007.10.23 |
申请号 |
US20050063692 |
申请日期 |
2005.02.23 |
申请人 |
ZYVEX CORPORATION |
发明人 |
BAUR CHRISTOF;STALLCUP, II RICHARD E. |
分类号 |
G01N23/00;H01J37/20;G01N1/28;G01N1/32;G01R31/305;G21K7/00;H01J37/28;H01J37/305 |
主分类号 |
G01N23/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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