| 摘要 |
A method and system for inductively coupling energy to a heating filament ( 7 A', 7 B', 7 C', 7 A, 7 B, 7 C) in a thermal processing environment. By applying AC power to a coil antenna ( 11 ) and inductive coupling to a filament (e.g., a halogen lamp filament), a number of connections that are subject to fatigue is reduced, thereby increasing the reliability of the heater ( 2 A, 2 B). Such an environment can be used to process semiconductor wafers ( 3 ) and liquid crystal displays.
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