发明名称 Optical thin film and mirror using the same
摘要 To provide an optical thin film structure capable of efficiently dissipating heat in an optical thin film which is generated upon irradiating a surface of an X-ray mirror made up of the optical thin film with an X-ray. The optical thin film having an isotope purity higher than a natural isotope abundance ratio is formed on a mirror to increase heat conductivity of the optical thin film itself and quickly dissipate heat accumulated in the thin film to the outside of an optical system. Consequently, the mirror having high reflectively can be obtained, in which a fine structure of the optical thin film is by no means broken.
申请公布号 US7286637(B2) 申请公布日期 2007.10.23
申请号 US20050546517 申请日期 2005.08.23
申请人 CANON KABUSHIKI KAISHA 发明人 IMAI KYOKO;ANDO KENJI;KANAZAWA HIDEHIRO
分类号 G21K1/06;C23C14/14;G02B5/08;G02B5/26;G02B5/28 主分类号 G21K1/06
代理机构 代理人
主权项
地址