发明名称 Methods and apparatus for inspecting an object
摘要 A method for inspecting an object using a structured light measurement system that includes a light source and an imaging sensor. The method includes emitting light from the light source, polarizing each of a plurality of different wavelengths of the light emitted from the light source at different polarization angles, projecting light emitted from the light source onto a surface of an object, receiving light reflected from the object surface with the imaging sensor, and analyzing the light received by the imaging sensor to facilitate inspecting at least a portion of the object.
申请公布号 US7285767(B2) 申请公布日期 2007.10.23
申请号 US20050256886 申请日期 2005.10.24
申请人 GENERAL ELECTRIC COMPANY 发明人 HARDING KEVIN GEORGE
分类号 G01J1/36;G01J4/00;G01N21/86;H01L27/00 主分类号 G01J1/36
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