发明名称 SHOWERHEAD
摘要 A shower head is provided to prevent a second disc from being detached from a third disc by integrally forming spraying holes which are formed in two stages with the second disc. A first disc(10) has a gas passage(11) formed in an axial direction and plural first grooves formed on one surface thereof. A second disc(20) has plural second grooves formed on the surface opposite to the first disc and plural spraying holes formed in an axial direction. Plural coupling members have one end inserted into the first groove and the other end inserted into the second groove so that the first and second discs are spaced apart from each other. The spraying holes are formed in two stages with different diameter.
申请公布号 KR100768673(B1) 申请公布日期 2007.10.22
申请号 KR20060048884 申请日期 2006.05.30
申请人 WIZIT CO., LTD. 发明人 PARK, SANG WON;HWANG, JAE HO
分类号 H01L21/304;H01L21/205 主分类号 H01L21/304
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