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发明名称
METHODS FOR PLANARIZATION OF METAL-CONTAINING SURFACES USING HALOGENS AND HALIDE SALTS
摘要
申请公布号
KR100769387(B1)
申请公布日期
2007.10.22
申请号
KR20047009896
申请日期
2002.12.17
申请人
发明人
分类号
B24B37/00;H01L21/302;C09G1/02;C09K3/14;C23F3/00;H01L21/304;H01L21/311;H01L21/321;H01L21/4763
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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