发明名称 MATERIAL FOR FORMING PATTERN, AND APPARATUS AND METHOD FOR FORMING PATTERN
摘要 <p>A material for forming a pattern which has a support and at least a photosensitive layer formed on the support, wherein the support has a haze value of 5.0 % or less, the photosensitive layer comprises a binder, a polymerizable compound and a photopolymerization initiator, and the above polymerizable compound comprises a compound having one polymerizable group in its molecule or a compound having three or more polymerizable groups in its molecule, and wherein when the above photosensitive layer is subjected to an exposure to a light and to a development, the minimum energy of the light used for the above exposure which does not cause the change of the thickness of the part to be exposed of the photosensitive layer after the exposure and the development is 0.1 to 20 mJ/cm^2.</p>
申请公布号 KR20070103021(A) 申请公布日期 2007.10.22
申请号 KR20077018091 申请日期 2007.08.06
申请人 FUJI FILM CORPORATION 发明人 MINAMI KAZUMORI;TAKASHIMA MASANOBU;WAKATA YUICHI
分类号 G03F7/004;H01L21/027 主分类号 G03F7/004
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