| 摘要 |
<p>A method for manufacturing an imprinting polymeric stamp and the polymeric stamp manufactured by the same are provided to improve the releasing ability of the stamp by forming a silicon-based polymer layer on an elastic film and imprinting a master on the film. A master(10) having a predetermined pattern is prepared, and then a silicon-based adhesive layer(30) is formed on an elastic film(20). A silicon-based polymer layer(40) is formed on the silicon-base adhesive layer. The master comes in contact with an upper surface of the silicon-based polymer layer to press the latter, and then the master is detached from the silicon-based polymer layer. A releasing agent is applied on the master.</p> |
