发明名称 APPARATUS FOR OPENING AND CLOSING CHAMBER DOOR
摘要 A door opening/closing device for a chamber is provided to reduce a weight of a door of the chamber by separating the door into at least two parts, thereby safely opening the door. At least two doors(10) are installed to open or close an upper plate(40) of a chamber(100). Extension parts(11) are fixed to both sides of the door, and are extended towards both sidewalls of the chamber, a hinge(12) provided on the end of the extension part. Hinge fixing parts(30) having hinges(32) are formed at both sides of the chamber. A connecting shaft(20) connects the extension part with the hinge of the hinge fixing part. A motor is connected to the end of the connecting shaft.
申请公布号 KR100768559(B1) 申请公布日期 2007.10.19
申请号 KR20060072331 申请日期 2006.07.31
申请人 SEMES CO., LTD. 发明人 JANG, JUNG WON;JOUNG, YOUNG CHUL;NOH, IL HO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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