MACHINING METHOD OF MICROSTRUCTURE AND MACHINING SYSTEM OF MICROSTRUCTURE

摘要

A machining method of microstructure in which an opposed-surface plate (211) is moved from a retreat position to a forming position and a film (1) is pressed against a die (5) and machined. Subsequently, a second block (211b) is separated from a first block (211a). Consequently, the total thermal capacity of the opposed-surface plate (211) is reduced by reducing the volume of the opposed-surface plate (211) at the time of cooling and cooling rate of the opposed-surface plate (211) can be enhanced by physically discharging heat stored in the opposed-surface plate (211). The cooling efficiency of the opposed-surface plate (211) is thereby enhanced and the heat cycle thereof can be shortened.