| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device capable of reducing the irregularity of a noise component corresponding to the arrangement of the respective concave reflection mirror of an illumination system and a light detection system. SOLUTION: The surface inspection device includes an illumination means 13 for irradiating the surface of an inspection target 20 with linear polarized light L1 to illuminate the same and a light detection means 14 for detecting the polarized component, which crosses the oscillation surface of the linear polarized light, in the light L2 emitted along the incident surface 3A of the linear polarized light from the surface of the inspection target 20. Concaved reflection mirrors 35 and 36 are arranged in the respective light paths of the illumination mans and the light detection means and the light path (e.g., light path 6B) crossing the incident surface is contained in at least one of the light paths of the illumination means and the light detection means. COPYRIGHT: (C)2008,JPO&INPIT |
