| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar actuator in which a mirror member is easily attachable to and detachable from a movable part. SOLUTION: A pair of U-shaped notches 12a, which are facing to each other, are provided on the side end part of a plate-shaped movable part 12 which is integrally formed with a torsion bar 11, and a pair of engaging parts 16a, which are facing to each other, are provided on the side end part of a flat-shaped mirror member 16 which is separately formed. The pair of engaging parts 16a provided on the mirror member 16 are engaged with the U-shaped notches 12a on the side end of the movable part 12, and the bent parts 16b provided at the end of the engaging parts 16a are engaged on the back face side of the side end part of the movable part 12. The engaging parts 16a have elasticity to some extent so that the mirror member 16 is attached and detached by only elastically deforming the engaging parts 16a by external force; thus attachment and detachment of the mirror member 16 are easily performed without giving a large load upon the torsion bar 11. COPYRIGHT: (C)2008,JPO&INPIT
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