| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope capable of rapidly correcting the positional deviation of a sample on an observation image, and a correction method for rapidly correcting the positional deviation of the sample on the observation image. SOLUTION: By receiving a power supply ON signal, the controller 40 of the microscope 100 picks up the image of the sample on a sample stage 30 by using an imaging apparatus 80 and sets a plurality of target frames. When a microscopist sets one of the target frames, the controller 40 stores the coordinates of the vertex thereof. When the magnification of an objective 20 is changed, the controller 40 picks up the enlarged image and stores the coordinates of the vertex of the enlarged target frame. Then, the controller 40 reduces the image enlarged further by masking an area other than the periphery of the target frame before enlargement. Thereafter, the controller 40 specifies a maximum matching position by pattern-matching the reduced image. The controller 40 obtains the moving amount of a coordinate origin from the specified position, and moves an X-axis stage 31 and a Y-axis stage 32, thereby correcting the positional deviation. COPYRIGHT: (C)2008,JPO&INPIT
|
