| 摘要 |
PROBLEM TO BE SOLVED: To provide a clean oven having almost no heat loss, having high cleaning performance, and reducing a facility load. SOLUTION: In the clean oven 1, a duct 11 provided in a furnace exterior and a furnace interior are connected to connect a connection B and a connection part C with mutually equal pressures of atmospheric gas, and the duct 11 is provided with a cooler 6 and a cooler fan 12 in an interior. Since the cooler 6 is provided in the furnace exterior, there is almost no heat loss, and since a damper is provided, there is no dust generation, and high cleaning performance is provided. Since the cooler fan 12 stops when supply of cooling water stops during heating, a duct for exhausting steam to a clean room exterior is unnecessary. COPYRIGHT: (C)2008,JPO&INPIT
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