| 摘要 |
Embodiments in accordance with the present invention provide a data analysis method that can estimate quantitatively how much the yield is increased by improving a manufacturing process by quantifying a yield impact on the yield of the product. A data group provided for each parameter is classified into a first group and a second group, based on the performance of the products, for each parameter, a base point of a distribution of the data group is calculated, based on the distribution, and a range of certain distance from the base point is decided. The number of data within this certain range belonging to the first group is counted and substituted for the variable FX, the number of data belonging to the second group is counted and substituted for the variable SX, the number of data outside this certain range belonging to the first group is counted and substituted for the variable FY, and the number of data belonging to the second group is counted and substituted for the variable SY. Moreover, a failure content ratio is calculated from the variables FX, FY, SX and SY, and the yield impact is calculated.
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