| 摘要 |
A three-dimensional capacitor structure has a first conductive layer, a second conductive layer disposed above the first conductive layer, and a plug layer disposed between the conductive layers. The first conductive layer includes first conductive closed-end frames, and first conductive islands disposed inside the first conductive closed-end frames. The second conductive layer includes second conductive closed-end frames, and second conductive islands disposed inside the second conductive closed-end frames. The second conductive closed-end frames line up with the first conductive islands, and the second conductive islands line up with the first conductive closed-end frames. The plug layer has plugs disposed in between each first conductive island and each second conductive closed-end frame, and in between each first conductive closed-end frame and each second conductive island.
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