APPARATUS AND METHODS FOR PREPARATION OF HIGH-PURITY SILICON RODS USING MIXED CORE MEANS

摘要

A method and an apparatus for manufacturing a polycrystal rod using a combined core member is provided to easily heat a second core member by preheating the second core member using a first core member electrically heated. A first core member(C1) made of resistive material and a second core member(C2) made of silicon are installed in an internal space of an eduction reactor. The first core member is electrically heated, and the second core member is preheated by using the heated first core member. The preheated second core member is electrically heated. A process gas is fed into the internal space of the eduction reactor while the first and second core members are electrically heated.