发明名称 CARBON NANOTUBE CONNECTED BODY, ITS MANUFACTURING METHOD, AND ELEMENT AND METHOD FOR DETECTING TARGET
摘要 <P>PROBLEM TO BE SOLVED: To provide a carbon nanotube connected body, which can be suitably used as a target detecting element, a sensor, etc., and in which carbon nanotubes are aligned, and further to provide efficient manufacturing method therefor. <P>SOLUTION: The carbon nanotube connected body is configured such that a plurality of carbon nanotubes are arrayed so as to connect one end of each carbon nanotube to a base material to be almost perpendicular to the base material. The method for manufacturing the carbon nanotube connected body includes a step of forming a nanohole structure body by forming a concave line on a metallic layer and by forming the nanohole structure body having a nanohole line having the nanoholes arranged on the concave line in the direction almost perpendicular to the metallic layer, a step of forming carbon nanotubes inside the nanoholes, a step of removing the carbon stuck on the surface of convex portions between the concave lines in the step of forming carbon nanotubes, and a step of melting the metallic layer. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2007268692(A) 申请公布日期 2007.10.18
申请号 JP20060100656 申请日期 2006.03.31
申请人 FUJITSU LTD;KANAGAWA ACAD OF SCI & TECHNOL;TOHOKU UNIV 发明人 ITO KENICHI;MASUDA HIDEKI;KYOTANI TAKASHI
分类号 B82B3/00;C01B31/02;G01N27/30;G01N27/327 主分类号 B82B3/00
代理机构 代理人
主权项
地址