WAFER CARRYING HAND

摘要

PROBLEM TO BE SOLVED: To provide a thin wafer carrying hand in which maintenance of an air passage is easy and a wafer can be set to a chuck even if reteaching is not performed for a robot. SOLUTION: A thin plate-shaped hand body (13) having a wafer suction surface provided on the top surface thereof is supported on a robot arm (19) at a rear end part (305) thereof. The hand body (13) is elastically supported on the robot arm (19) movably in a vertical direction to the wafer suction surface. An air passage (307) in the hand body (13) is a groove dug from a lower surface of the hand body (13) which is covered with a cover (323). A resin tape (325) is stuck on a region covering the cover (323) on the lower surface of the hand body (13) to seal a gap around the cover (323) of the air passage (307). By peeling the resin tape (325) to remove the cover (323) the air passage (307) can be cleaned. COPYRIGHT: (C)2008,JPO&INPIT