| 摘要 |
PROBLEM TO BE SOLVED: To improve treatment efficiency by shortening a time required to start the application of a coating liquid. SOLUTION: A coating mechanism (nozzle unit 2) has nozzles 21-23 for discharging the coating liquid downward. A first box 71 has a space inside. A stage 4 is for placing a substrate P inside the first box 71. A partition member 9 is arranged in the first box 71, has a shape to form a space inside and has an opening part at one side. A first gas supply means (supply pipe 78) supplies an inert gas to the inside space of the partition member 9. The stage 4 is moved relatively to the nozzles 21-23 and the partition member 9 so that the substrate P is passed under the nozzles 21-23 and enters to the inside of the partition member 9 from the opening part by a stage moving mechanism part 5. COPYRIGHT: (C)2008,JPO&INPIT |
