| 摘要 |
PROBLEM TO BE SOLVED: To provide a planar actuator in which a movable part is easily positioned with respect to a torsion bar and the fixing strength of the movable part on the torsion bar is enhanced. SOLUTION: A rectangular projected part 21a projected towards the thickness direction of the torsion bar 21 is integrally formed in the center of the longitudinal direction of the torsion bar 21 made of a semiconductor material. A long groove-shaped recessed part 23a similar to the external shape of the torsion bar 21, and a rectangular recessed part 23b similar to the external shape of the rectangular projected part 21a and formed in the center of the longitudinal direction of the torsion bar 21 are formed on the back face of a mirror member 23, the long groove-shaped recessed part 23a and the rectangular recessed part 23b are engaged with the torsion bar 21 and the projected part 21a, respectively; thus the mirror member 23 is positioned and fixed on the torsion bar 21. The mirror member 23 is accurately and easily positioned in the longitudinal direction of the torsion bar 21 by engaging the rectangular recessed part 23b formed on the back face of the mirror member 23 with the projected part 21a of the torsion bar 21. COPYRIGHT: (C)2008,JPO&INPIT
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