ARTICLE STORAGE FACILITY FOR CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To provide article storage facility for a clean room capable of improving cleanliness of an article storage condition while maintaining cleanliness in the clean room. SOLUTION: An article storage warehouse W provided with an article storage shelf S provided with article storage parts 14 by arranging them side by side in the direction of lateral width of the shelf and an article conveyance vehicle V moving into the direction of lateral width of the shelf in a conveyance vehicle moving space 15 in front of the article storage shelf S is installed in the clean room 1. The conveyance vehicle moving space 15 is provided so as to protrude outward in the direction of lateral width of the shelf more than the article storage shelf S. A space 16 for exhausting air communicating with an outwardly protruding part 15t so as to enable air flow is provided in a side part of the article storage shelf S in a condition in which the space 16 for exhausting air is partitioned from the article storage shelf S by a bulkhead body 17 so as to prevent air flow. A partitioning wall 25 for partitioning so as to divide the outwardly protruding part 15t in the conveyance vehicle moving space 15 and the space 16 for exhausting air from the inside of the clean room 1 so as to prevent air flow is provided. A communicating passage 18 outside of the clean room for communicating the space 16 for exhausting air with the outside of the clean room 1 so as to enable air flow is provided. COPYRIGHT: (C)2008,JPO&INPIT