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发明名称
MIM/MIS-Struktur mit Praseodymtitanat als Isolatormaterial
摘要
申请公布号
DE102005051573(B4)
申请公布日期
2007.10.18
申请号
DE200510051573
申请日期
2005.10.21
申请人
IHP GMBH - INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/INSTITUT FUER INNOVATIVE MIKROELEKTRONIK
发明人
MUESSIG, HANS-JOACHIM;LIPPERT, GUNTHER;WENGER, CHRISTIAN
分类号
H01L27/08;H01L29/78;H01L29/92
主分类号
H01L27/08
代理机构
代理人
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