| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid contact probe that is superior in spring characteristics and in contact characteristics with an electrode. SOLUTION: This contact probe is equipped with an end part making contact with a measuring surface, a spring part connected to the end part, and a support part, connected to the spring part and supporting the spring part on a substrate. The end part, the spring part, and the support part, are structured so that the end part is elastically deformed by the spring part with the end part kept in contact with the measuring surface, when the end part is pressed against the measuring surface with the support part fixed. The end part and the spring part are characterized in that they are plate-like structures, each having a plane along a direction in which they are elastically deformed, and that a connection portion of the end part to the spring part has a structure buried in the plane of the spring part. COPYRIGHT: (C)2008,JPO&INPIT
|
