METHOD FOR SEPARATING SUPPORT PLATE

摘要

A lifting/lowering device (2) is lowered, and an ultraviolet lamp (22) is located immediately above a support plate (11). In this state, the lamp is lighted to allow the ultraviolet light to reach a photocatalyst layer (13) through the support plate (11). This excites the photocatalyst to generate electrons which are reacted with O<SUB>2</SUB> to form O<SUB>2</SUB>-. O<SUB>2</SUB>- is reacted with organic matter (adhesive) to evolve gas, for example, H<SUB>2</SUB>O and CO<SUB>2</SUB>, and this gas is spread between the photocatalyst layer (13) and the adhesive (12) to render the support plate (11) separable easily from a substrate (W).